.
| Name: | ZHOU Chenggang | Address: | Room 903, Center for Micro- and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei, Anhui, 230027, PR China | Tel: | 86-551-63607217 | E-mail: | cgzhou(AT)ustc.edu.cn | EDUCATION AND RESEARCH EXPERIENCE 09/1997-06/2002 | University of Science and Technology of China Bachelor of Mechanical Design, Manufacturing and Automation | 09/2002–06/2007 | University of Science and Technology of China PhD of Testing Measure Technology and Instrument | 07/2007-07/2010 | Shanghai Academy of Science and Technology System Engineer/First Deputy Director/Executive Director | 08/2010-present | University of Science and Technology of China Center for Micro- and Nanoscale Research and Fabrication |
RESEARCH INTERESTS The application of micro-nano fabrication and characterization technology in microelectronics, optoelectronics, life science and other disciplines, chip failure analysis and detection, test and measurement technology and instrument development. |
REPRESENTATIVE PUBLICATIONS Cheng Mosong and Zhou Chenggang, Optimizing photon sieves to approach Fresnel diffraction limit via pixel based inverse lithography Journal of Vacuum Science & Technology B 29(4) 041002 2011.07 Zhou Chenggang, WangYingnan, Chen Yuhang, Huang Wenhao, Alignment measurement of two-dimensional zero-reference marks, Precision Engineering, 2006, 30: 238-241
|
|